dorsal/arxiv
View SchemaOverlay Alignment Using Two Photonic Crystals
| Authors | Can Peng, Keith Morton, Zhaoning Yu, Stephen Y. Chou |
|---|---|
| Categories | |
| ArXiv ID | physics/0512073 |
| URL | https://arxiv.org/abs/physics/0512073 |
Abstract
In this paper we proposed a novel overlay alignment method using two sets of identical photonic crystals (PhCs). In this method the reflection or transmission spectrum of the two overlaid photonic crystals is measured to help wafer tilt, yaw rotation, and translation aligning. The initial testing results with two 1D photonic crystals and analysis of the alignment accuracy are presented. This method is particularly useful in building photonic crystal stacks with nanoimprint lithography (NIL).
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"abstract": "In this paper we proposed a novel overlay alignment method using two sets of\nidentical photonic crystals (PhCs). In this method the reflection or\ntransmission spectrum of the two overlaid photonic crystals is measured to help\nwafer tilt, yaw rotation, and translation aligning. The initial testing results\nwith two 1D photonic crystals and analysis of the alignment accuracy are\npresented. This method is particularly useful in building photonic crystal\nstacks with nanoimprint lithography (NIL).",
"arxiv_id": "physics/0512073",
"authors": [
"Can Peng",
"Keith Morton",
"Zhaoning Yu",
"Stephen Y. Chou"
],
"categories": [
"physics.optics"
],
"title": "Overlay Alignment Using Two Photonic Crystals",
"url": "https://arxiv.org/abs/physics/0512073"
},
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