{
  "annotation_id": "e9e59735-4e77-458d-bbb7-eebf044f194c",
  "date_created": "2026-03-02T18:00:53.677000Z",
  "date_modified": "2026-03-02T18:00:53.677000Z",
  "file_hash": "bb90be6e18b42022396e334ba9f5b120327082334c1d19eedf923cdd08ca5899",
  "private": false,
  "record": {
    "abstract": "Gold micro-mirrors have been formed in silicon in an inverted pyramidal\nshape. The pyramidal structures are created in the (100) surface of a silicon\nwafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors\nare then formed by sputtering gold onto the smooth silicon (111) faces of the\npyramids. These mirrors show great promise as high quality optical devices\nsuitable for integration into MOEMS systems.",
    "arxiv_id": "physics/0409021",
    "authors": [
      "Z. Moktadir",
      "C. Gollasch",
      "E. Koukharenko",
      "M. Kraft",
      "G. Vijaya Prakash",
      "J. J. Baumberg",
      "M. Trupke",
      "S. Eriksson",
      "E. A. Hinds"
    ],
    "categories": [
      "physics.optics"
    ],
    "title": "Fabrication of micro-mirrors with pyramidal shape using anisotropic   etching of silicon",
    "url": "https://arxiv.org/abs/physics/0409021"
  },
  "schema_id": "dorsal/arxiv",
  "source": {
    "execution_id": "1be615c1-5a48-43e9-9f56-dcb178907b55",
    "id": "arXiv Dataset IDs",
    "type": "Model",
    "variant": "snapshot-2026-03-01",
    "version": "0.1.0"
  },
  "user_id": 1000002
}