dorsal/arxiv
View SchemaSemiempirical charge distribution of clusters in the ion sputtering of metal
| Authors | Victor I. Matveev, Olga V. Karpova |
|---|---|
| Categories | |
| ArXiv ID | physics/9911058 |
| URL | https://arxiv.org/abs/physics/9911058 |
Abstract
We propose the generalization of a known established empirically (Wahl W. and Wucher A. Nucl. Instrum. Meth. B 94, 36(1994)) power law, describing relative mass-spectra of neutral sputtered clusters, on the cases of arbitrary cluster charges. The fluctuation mechanism of charge state formation of sputtering products in the form of large clusters with the number of atoms N > 5 is also proposed. The simple formula obtained by us has been shown a good agreement with the experimental data.
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"abstract": "We propose the generalization of a known established empirically (Wahl W. and\nWucher A. Nucl. Instrum. Meth. B 94, 36(1994)) power law, describing relative\nmass-spectra of neutral sputtered clusters, on the cases of arbitrary cluster\ncharges. The fluctuation mechanism of charge state formation of sputtering\nproducts in the form of large clusters with the number of atoms N \u003e 5 is also\nproposed. The simple formula obtained by us has been shown a good agreement\nwith the experimental data.",
"arxiv_id": "physics/9911058",
"authors": [
"Victor I. Matveev",
"Olga V. Karpova"
],
"categories": [
"physics.atm-clus",
"physics.ins-det"
],
"title": "Semiempirical charge distribution of clusters in the ion sputtering of metal",
"url": "https://arxiv.org/abs/physics/9911058"
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