dorsal/arxiv
View SchemaUltimate limits to inertial mass sensing based upon nanoelectromechanical systems
| Authors | K. L. Ekinci, Y. T. Yang, M. L. Roukes |
|---|---|
| Categories | |
| ArXiv ID | physics/0309075 |
| URL | https://arxiv.org/abs/physics/0309075 |
| DOI | 10.1063/1.1642738 |
Abstract
Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 1,000 - 100,000. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo, which are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing - ultimately with resolution at the level of individual molecules.
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"date_created": "2026-03-02T18:00:46.722000Z",
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"abstract": "Nanomechanical resonators can now be realized that achieve fundamental\nresonance frequencies exceeding 1 GHz, with quality factors (Q) in the range\n1,000 - 100,000. The minuscule active masses of these devices, in conjunction\nwith their high Qs, translate into unprecedented inertial mass sensitivities.\nThis makes them natural candidates for a variety of mass sensing applications.\nHere we evaluate the ultimate mass sensitivity limits for nanomechanical\nresonators operating in vacuo, which are imposed by a number of fundamental\nphysical noise processes. Our analyses indicate that nanomechanical resonators\noffer immense potential for mass sensing - ultimately with resolution at the\nlevel of individual molecules.",
"arxiv_id": "physics/0309075",
"authors": [
"K. L. Ekinci",
"Y. T. Yang",
"M. L. Roukes"
],
"categories": [
"physics.ins-det",
"physics.bio-ph"
],
"doi": "10.1063/1.1642738",
"title": "Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems",
"url": "https://arxiv.org/abs/physics/0309075"
},
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