dorsal/arxiv
View SchemaOn the applicability of Sato's equation to capacitative radio frequency sheaths
| Authors | J. Balakrishnan, G. R. Nagabhushana |
|---|---|
| Categories | |
| ArXiv ID | physics/0310038 |
| URL | https://arxiv.org/abs/physics/0310038 |
| DOI | 10.1088/0022-3727/33/24/101 |
| Journal | J.Phys.D:Appl.Phys.33 (2000), L153-L157 |
Abstract
We show that the time dependent version of Sato's equation, when applied to capacitative rf sheaths is no longer independent of the electric field of the space charge, and discuss the use of the equation for a specific sheath model.
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"abstract": "We show that the time dependent version of Sato\u0027s equation, when applied to\ncapacitative rf sheaths is no longer independent of the electric field of the\nspace charge, and discuss the use of the equation for a specific sheath model.",
"arxiv_id": "physics/0310038",
"authors": [
"J. Balakrishnan",
"G. R. Nagabhushana"
],
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"doi": "10.1088/0022-3727/33/24/101",
"journal_ref": "J.Phys.D:Appl.Phys.33 (2000), L153-L157",
"title": "On the applicability of Sato\u0027s equation to capacitative radio frequency sheaths",
"url": "https://arxiv.org/abs/physics/0310038"
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