dorsal/arxiv
View SchemaEffect of Electron Energy Distribution Function on Power Deposition and Plasma Density in an Inductively Coupled Discharge at Very Low Pressures
| Authors | Badri Ramamurthi, Demetre J. Economou, Igor D. Kaganovich |
|---|---|
| Categories | |
| ArXiv ID | physics/0210114 |
| URL | https://arxiv.org/abs/physics/0210114 |
| DOI | 10.1088/0963-0252/12/3/302 |
Abstract
A self-consistent 1-D model was developed to study the effect of the electron energy distribution function (EEDF) on power deposition and plasma density profiles in a planar inductively coupled plasma (ICP) in the non-local regime (pressure < 10 mTorr). The model consisted of three modules: (1) an electron energy distribution function (EEDF) module to compute the non-Maxwellian EEDF, (2) a non-local electron kinetics module to predict the non-local electron conductivity, RF current, electric field and power deposition profiles in the non-uniform plasma, and (3) a heavy species transport module to solve for the ion density and velocity profiles as well as the metastable density. Results using the non-Maxwellian EEDF model were compared with predictions using a Maxwellian EEDF, under otherwise identical conditions. The RF electric field, current, and power deposition profiles were different, especially at 1mTorr, for which the electron effective mean free path was larger than the skin depth. The plasma density predicted by the Maxwellian EEDF was up to 93% larger for the conditions examined. Thus, the non-Maxwellian EEDF must be accounted for in modeling ICPs at very low pressures.
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"date_created": "2026-03-02T18:00:42.809000Z",
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"abstract": "A self-consistent 1-D model was developed to study the effect of the electron\nenergy distribution function (EEDF) on power deposition and plasma density\nprofiles in a planar inductively coupled plasma (ICP) in the non-local regime\n(pressure \u003c 10 mTorr). The model consisted of three modules: (1) an electron\nenergy distribution function (EEDF) module to compute the non-Maxwellian EEDF,\n(2) a non-local electron kinetics module to predict the non-local electron\nconductivity, RF current, electric field and power deposition profiles in the\nnon-uniform plasma, and (3) a heavy species transport module to solve for the\nion density and velocity profiles as well as the metastable density. Results\nusing the non-Maxwellian EEDF model were compared with predictions using a\nMaxwellian EEDF, under otherwise identical conditions. The RF electric field,\ncurrent, and power deposition profiles were different, especially at 1mTorr,\nfor which the electron effective mean free path was larger than the skin depth.\nThe plasma density predicted by the Maxwellian EEDF was up to 93% larger for\nthe conditions examined. Thus, the non-Maxwellian EEDF must be accounted for in\nmodeling ICPs at very low pressures.",
"arxiv_id": "physics/0210114",
"authors": [
"Badri Ramamurthi",
"Demetre J. Economou",
"Igor D. Kaganovich"
],
"categories": [
"physics.plasm-ph"
],
"doi": "10.1088/0963-0252/12/3/302",
"title": "Effect of Electron Energy Distribution Function on Power Deposition and Plasma Density in an Inductively Coupled Discharge at Very Low Pressures",
"url": "https://arxiv.org/abs/physics/0210114"
},
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