{
  "annotation_id": "af6a7ee7-d138-4d4f-9218-276730fe8d6d",
  "date_created": "2026-03-02T18:01:04.403000Z",
  "date_modified": "2026-03-02T18:01:04.403000Z",
  "file_hash": "8c0d3d415095d92d825e39bb9e0dd4efc90b5aea854714e8a661b0d9313adb64",
  "private": false,
  "record": {
    "abstract": "An extremely fast time-harmonic finite element solver developed for the\ntransmission analysis of photonic crystals was applied to mask simulation\nproblems. The applicability was proven by examining a set of typical problems\nand by a benchmarking against two established methods (FDTD and a differential\nmethod) and an analytical example. The new finite element approach was up to\n100 times faster than the competing approaches for moderate target accuracies,\nand it was the only method which allowed to reach high target accuracies.",
    "arxiv_id": "physics/0601143",
    "authors": [
      "S. Burger",
      "R. K\u00f6hle",
      "L. Zschiedrich",
      "W. Gao",
      "F. Schmidt",
      "R. M\u00e4rz",
      "C. N\u00f6lscher"
    ],
    "categories": [
      "physics.optics",
      "physics.comp-ph"
    ],
    "doi": "10.1117/12.631696",
    "journal_ref": "Proc. SPIE Vol. 5992 (2005) 599216, (25th Annual BACUS Symposium\n  on Photomask Technology, J. T. Weed, P. M. Martin, Eds.)",
    "title": "Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask   Simulation",
    "url": "https://arxiv.org/abs/physics/0601143"
  },
  "schema_id": "dorsal/arxiv",
  "source": {
    "execution_id": "faddf0e9-0798-49b2-8b76-731568b97647",
    "id": "arXiv Dataset IDs",
    "type": "Model",
    "variant": "snapshot-2026-03-01",
    "version": "0.1.0"
  },
  "user_id": 1000002
}