{
  "annotation_id": "ad1eeeb5-3910-42b9-bb6e-6b13e46ca014",
  "date_created": "2026-03-02T18:00:46.917000Z",
  "date_modified": "2026-03-02T18:00:46.917000Z",
  "file_hash": "319f688f7baeae659d4f3513554ab7719c967319d8d633242466f40cb6e4fa1e",
  "private": false,
  "record": {
    "abstract": "A hierarchical approach to the construction of compound distributions for\nprocess-induced faults in IC manufacture is proposed. Within this framework,\nthe negative binomial distribution is treated as level-1 models. The\nhierarchical approach to fault distribution offers an integrated picture of how\nfault density varies from region to region within a wafer, from wafer to wafer\nwithin a batch, and so on. A theory of compound-distribution hierarchies is\ndeveloped by means of generating functions. A study of correlations, which\nnaturally appears in microelectronics due to the batch character of IC\nmanufacture, is proposed. Taking these correlations into account is of\nsignificant importance for developing procedures for statistical quality\ncontrol in IC manufacture. With respect to applications, hierarchies of yield\nmeans and yield probability-density functions are considered.",
    "arxiv_id": "physics/0310012",
    "authors": [
      "Yu. I. Bogdanov",
      "N. A. Bogdanova",
      "A. V. Rudnev"
    ],
    "categories": [
      "physics.data-an",
      "cond-mat.stat-mech"
    ],
    "doi": "10.1117/12.562667",
    "title": "Multilevel Clustering Fault Model for IC Manufacture",
    "url": "https://arxiv.org/abs/physics/0310012"
  },
  "schema_id": "dorsal/arxiv",
  "source": {
    "execution_id": "5dfee686-1a14-4ce2-9b39-d9002963af1b",
    "id": "arXiv Dataset IDs",
    "type": "Model",
    "variant": "snapshot-2026-03-01",
    "version": "0.1.0"
  },
  "user_id": 1000002
}