dorsal/arxiv
View SchemaStatistical Yield Modeling for IC Manufacture: Hierarchical Fault Distributions
| Authors | Yu. I. Bogdanov, N. A. Bogdanova, V. L. Dshkhunyan |
|---|---|
| Categories | |
| ArXiv ID | physics/0303039 |
| URL | https://arxiv.org/abs/physics/0303039 |
| Journal | Russian Microelectronics, 2003, V.32, N 1, P. 51 |
Abstract
A hierarchical approach to the construction of compound distributions for process-induced faults in IC manufacture is proposed. Within this framework, the negative binomial distribution and the compound binomial distribution are treated as level-1 models. The hierarchical approach to fault distribution offers an integrated picture of how fault density varies from region to region within a wafer, from wafer to wafer within a batch, and so on. A theory of compound-distribution hierarchies is developed by means of generating functions. With respect to applications, hierarchies of yield means and yield probability-density functions are considered and an in-process measure of yield loss is introduced. It is shown that the hierarchical approach naturally embraces the Bayesian approach.
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"abstract": "A hierarchical approach to the construction of compound distributions for\nprocess-induced faults in IC manufacture is proposed. Within this framework,\nthe negative binomial distribution and the compound binomial distribution are\ntreated as level-1 models. The hierarchical approach to fault distribution\noffers an integrated picture of how fault density varies from region to region\nwithin a wafer, from wafer to wafer within a batch, and so on. A theory of\ncompound-distribution hierarchies is developed by means of generating\nfunctions. With respect to applications, hierarchies of yield means and yield\nprobability-density functions are considered and an in-process measure of yield\nloss is introduced. It is shown that the hierarchical approach naturally\nembraces the Bayesian approach.",
"arxiv_id": "physics/0303039",
"authors": [
"Yu. I. Bogdanov",
"N. A. Bogdanova",
"V. L. Dshkhunyan"
],
"categories": [
"physics.data-an",
"cond-mat.stat-mech"
],
"journal_ref": "Russian Microelectronics, 2003, V.32, N 1, P. 51",
"title": "Statistical Yield Modeling for IC Manufacture: Hierarchical Fault Distributions",
"url": "https://arxiv.org/abs/physics/0303039"
},
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