dorsal/arxiv
View SchemaNomarski imaging interferometry to measure the displacement field of MEMS
| Authors | Fabien Amiot, Jean Paul Roger |
|---|---|
| Categories | |
| ArXiv ID | physics/0610183 |
| URL | https://arxiv.org/abs/physics/0610183 |
| DOI | 10.1364/AO.45.007800 |
| Journal | Applied Optics 45(30) (20/10/2006) 7800 |
Abstract
We propose to use a Nomarski imaging interferometer to measure the out-of-plane displacement field of MEMS. It is shown that the measured optical phase arises both from height and slope gradients. Using four integrating buckets a more efficient approach to unwrap the measured phase is presented, thus making the method well suited for highly curved objects. Slope and height effects are then decoupled by expanding the displacement field on a functions basis, and the inverse transformation is applied to get a displacement field from a measure of the optical phase map change with a mechanical loading. A measurement reproducibility of about 10 pm is achieved, and typical results are shown on a microcantilever under thermal actuation, thereby proving the ability of such a set-up to provide a reliable full-field kinematic measurement without surface modification.
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"abstract": "We propose to use a Nomarski imaging interferometer to measure the\nout-of-plane displacement field of MEMS. It is shown that the measured optical\nphase arises both from height and slope gradients. Using four integrating\nbuckets a more efficient approach to unwrap the measured phase is presented,\nthus making the method well suited for highly curved objects. Slope and height\neffects are then decoupled by expanding the displacement field on a functions\nbasis, and the inverse transformation is applied to get a displacement field\nfrom a measure of the optical phase map change with a mechanical loading. A\nmeasurement reproducibility of about 10 pm is achieved, and typical results are\nshown on a microcantilever under thermal actuation, thereby proving the ability\nof such a set-up to provide a reliable full-field kinematic measurement without\nsurface modification.",
"arxiv_id": "physics/0610183",
"authors": [
"Fabien Amiot",
"Jean Paul Roger"
],
"categories": [
"physics.class-ph",
"physics.optics"
],
"doi": "10.1364/AO.45.007800",
"journal_ref": "Applied Optics 45(30) (20/10/2006) 7800",
"title": "Nomarski imaging interferometry to measure the displacement field of MEMS",
"url": "https://arxiv.org/abs/physics/0610183"
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