dorsal/arxiv
View SchemaTechnology for Production of Ultra-Thin Crystal Silicon Membranes
| Authors | V. B. Vyssotsky, E. V. Lobko, A. S. Lobko |
|---|---|
| Categories | |
| ArXiv ID | physics/0508079 |
| URL | https://arxiv.org/abs/physics/0508079 |
| Journal | Vyssotsky V.B., Lobko E.V., Lobko A.S. // Proc. 5th Intl. Conf. ''Education, Industry, International Relation'', Minsk-2004, p. 268-271 (in Russian) |
Abstract
Ultra-thin crystal targets in shape of self-supporting membranes were produced for our experiments with parametric x-rays emitted by low-energy electrons. Concise description of the technology developed for production of silicon crystal membranes and the technique for the membrane thickness measurements are considered in the paper. Membrane thickness of ~0.5 micron at 1.0 mm diameter supporting by 2x2 mm silicon substrate of ~200 microns thickness is achieved. Developed technology for thin crystal membrane production can also be applied for manufacturing of various membrane-containing sensors
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"abstract": "Ultra-thin crystal targets in shape of self-supporting membranes were\nproduced for our experiments with parametric x-rays emitted by low-energy\nelectrons. Concise description of the technology developed for production of\nsilicon crystal membranes and the technique for the membrane thickness\nmeasurements are considered in the paper. Membrane thickness of ~0.5 micron at\n1.0 mm diameter supporting by 2x2 mm silicon substrate of ~200 microns\nthickness is achieved. Developed technology for thin crystal membrane\nproduction can also be applied for manufacturing of various membrane-containing\nsensors",
"arxiv_id": "physics/0508079",
"authors": [
"V. B. Vyssotsky",
"E. V. Lobko",
"A. S. Lobko"
],
"categories": [
"physics.ins-det"
],
"journal_ref": "Vyssotsky V.B., Lobko E.V., Lobko A.S. // Proc. 5th Intl. Conf.\n \u0027\u0027Education, Industry, International Relation\u0027\u0027, Minsk-2004, p. 268-271 (in\n Russian)",
"title": "Technology for Production of Ultra-Thin Crystal Silicon Membranes",
"url": "https://arxiv.org/abs/physics/0508079"
},
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