dorsal/arxiv
View SchemaUTA versus line emission for EUVL: Studies on xenon emission at the NIST EBIT
| Authors | K. Fahy, P. Dunne, L. Mckinney, G. O'sullivan, E. Sokell, J. White, A. Aguilar, J. M. Pomeroy, J. N. Tan, B. Blagojevic, E. -O. Lebigot, J. D. Gillaspy |
|---|---|
| Categories | |
| ArXiv ID | physics/0507046 |
| URL | https://arxiv.org/abs/physics/0507046 |
| DOI | 10.1088/0022-3727/37/23/003 |
| Journal | Journal of Physics D 37 (2004) 3225-3232 |
Abstract
Spectra from xenon ions have been recorded at the NIST EBIT and the emission into a 2% bandwidth at 13.5 nm arising from 4d-5p transitions compared with that from 4d-4f and 4p-4d transitions in Xe XI and also with that obtained from the unresolved transition array (UTA) observed to peak just below 11 nm. It was found that an improvement of a factor of five could be gained in photon yield using the UTA rather than the 4d-5p emission. The results are compared with atomic structure calculations and imply that a significant gain in efficiency should be obtained using tin, in which the emission at 13.5 nm comes from a similar UTA, rather than xenon as an EUVL source material.
{
"annotation_id": "7be66d8c-429f-41ed-990b-e7d491b064a6",
"date_created": "2026-03-02T18:01:00.070000Z",
"date_modified": "2026-03-02T18:01:00.070000Z",
"file_hash": "ce88c1f90bec570b6f84429feb4366cd4c7adb477b508bab7039b0c56e949973",
"private": false,
"record": {
"abstract": "Spectra from xenon ions have been recorded at the NIST EBIT and the emission\ninto a 2% bandwidth at 13.5 nm arising from 4d-5p transitions compared with\nthat from 4d-4f and 4p-4d transitions in Xe XI and also with that obtained from\nthe unresolved transition array (UTA) observed to peak just below 11 nm. It was\nfound that an improvement of a factor of five could be gained in photon yield\nusing the UTA rather than the 4d-5p emission. The results are compared with\natomic structure calculations and imply that a significant gain in efficiency\nshould be obtained using tin, in which the emission at 13.5 nm comes from a\nsimilar UTA, rather than xenon as an EUVL source material.",
"arxiv_id": "physics/0507046",
"authors": [
"K. Fahy",
"P. Dunne",
"L. Mckinney",
"G. O\u0027sullivan",
"E. Sokell",
"J. White",
"A. Aguilar",
"J. M. Pomeroy",
"J. N. Tan",
"B. Blagojevic",
"E. -O. Lebigot",
"J. D. Gillaspy"
],
"categories": [
"physics.atom-ph"
],
"doi": "10.1088/0022-3727/37/23/003",
"journal_ref": "Journal of Physics D 37 (2004) 3225-3232",
"title": "UTA versus line emission for EUVL: Studies on xenon emission at the NIST EBIT",
"url": "https://arxiv.org/abs/physics/0507046"
},
"schema_id": "dorsal/arxiv",
"source": {
"execution_id": "c89aed58-ec5d-4285-99a6-087c741e5d6e",
"id": "arXiv Dataset IDs",
"type": "Model",
"variant": "snapshot-2026-03-01",
"version": "0.1.0"
},
"user_id": 1000002
}