dorsal/arxiv
View SchemaRevisiting the anomalous rf field penetration into a warm plasma
| Authors | Igor D. Kaganovich, Oleg V. Polomarov, Constantine E. Theodosiou |
|---|---|
| Categories | |
| ArXiv ID | physics/0506135 |
| URL | https://arxiv.org/abs/physics/0506135 |
| DOI | 10.1109/TPS.2006.873253 |
Abstract
Radio frequency waves do not penetrate into a plasma and are damped within it. The electric field of the wave and plasma current are concentrated near the plasma boundary in a skin layer. Electrons can transport the plasma current away from the skin layer due to their thermal motion. As a result, the width of the skin layer increases when electron temperature effects are taken into account. This phenomenon is called anomalous skin effect. The anomalous penetration of the rf electric field occurs not only for transversely propagating to the plasma boundary wave (inductively coupled plasmas) but also for the wave propagating along the plasma boundary (capacitively coupled plasmas). Such anomalous penetration of the rf field modifies the structure of the capacitive sheath. Recent advances in the nonlinear, nonlocal theory of the capacitive sheath are reported. It is shown that separating the electric field profile into exponential and non-exponential parts yields an efficient qualitative and quantitative description of the anomalous skin effect in both inductively and capacitively coupled plasma.
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"abstract": "Radio frequency waves do not penetrate into a plasma and are damped within\nit. The electric field of the wave and plasma current are concentrated near the\nplasma boundary in a skin layer. Electrons can transport the plasma current\naway from the skin layer due to their thermal motion. As a result, the width of\nthe skin layer increases when electron temperature effects are taken into\naccount. This phenomenon is called anomalous skin effect. The anomalous\npenetration of the rf electric field occurs not only for transversely\npropagating to the plasma boundary wave (inductively coupled plasmas) but also\nfor the wave propagating along the plasma boundary (capacitively coupled\nplasmas). Such anomalous penetration of the rf field modifies the structure of\nthe capacitive sheath. Recent advances in the nonlinear, nonlocal theory of the\ncapacitive sheath are reported. It is shown that separating the electric field\nprofile into exponential and non-exponential parts yields an efficient\nqualitative and quantitative description of the anomalous skin effect in both\ninductively and capacitively coupled plasma.",
"arxiv_id": "physics/0506135",
"authors": [
"Igor D. Kaganovich",
"Oleg V. Polomarov",
"Constantine E. Theodosiou"
],
"categories": [
"physics.plasm-ph",
"physics.gen-ph"
],
"doi": "10.1109/TPS.2006.873253",
"title": "Revisiting the anomalous rf field penetration into a warm plasma",
"url": "https://arxiv.org/abs/physics/0506135"
},
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