dorsal/arxiv
View SchemaAC-coupled GaAs microstrip detectors with a new type of integrated bias resistors
| Authors | R. Irsigler, R. Geppert, R. Goeppert, M. Hornung, J. Ludwig, M. Rogalla, K. Runge, Th. Schmid, A. Soldner-Rembold, M. Webel, C. Weber |
|---|---|
| Categories | |
| ArXiv ID | physics/9709041 |
| URL | https://arxiv.org/abs/physics/9709041 |
| DOI | 10.1016/S0168-9002(98)00007-2 |
| Journal | Nucl.Instrum.Meth. A406 (1998) 427-434 |
Abstract
Full size single-sided GaAs microstrip detectors with integrated coupling capacitors and bias resistors have been fabricated on 3'' substrate wafers. PECVD deposited SiO_2 and SiO_2/Si_3N_4 layers were used to provide coupling capacitaces of 32.5 pF/cm and 61.6 pF/cm, respectively. The resistors are made of sputtered CERMET using simple lift of technique. The sheet resistivity of 78 kOhm/sq. and the thermal coefficient of resistance of less than 4x10^-3 / degree C satisfy the demands of small area biasing resistors, working on a wide temperature range.
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"abstract": "Full size single-sided GaAs microstrip detectors with integrated coupling\ncapacitors and bias resistors have been fabricated on 3\u0027\u0027 substrate wafers.\nPECVD deposited SiO_2 and SiO_2/Si_3N_4 layers were used to provide coupling\ncapacitaces of 32.5 pF/cm and 61.6 pF/cm, respectively. The resistors are made\nof sputtered CERMET using simple lift of technique. The sheet resistivity of 78\nkOhm/sq. and the thermal coefficient of resistance of less than 4x10^-3 /\ndegree C satisfy the demands of small area biasing resistors, working on a wide\ntemperature range.",
"arxiv_id": "physics/9709041",
"authors": [
"R. Irsigler",
"R. Geppert",
"R. Goeppert",
"M. Hornung",
"J. Ludwig",
"M. Rogalla",
"K. Runge",
"Th. Schmid",
"A. Soldner-Rembold",
"M. Webel",
"C. Weber"
],
"categories": [
"physics.ins-det"
],
"doi": "10.1016/S0168-9002(98)00007-2",
"journal_ref": "Nucl.Instrum.Meth. A406 (1998) 427-434",
"title": "AC-coupled GaAs microstrip detectors with a new type of integrated bias resistors",
"url": "https://arxiv.org/abs/physics/9709041"
},
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