dorsal/arxiv
View SchemaEffect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges
| Authors | Badri Ramamurthi, Demetre J. Economou, Igor D. Kaganovich |
|---|---|
| Categories | |
| ArXiv ID | physics/0208053 |
| URL | https://arxiv.org/abs/physics/0208053 |
| DOI | 10.1088/0963-0252/12/2/308 |
Abstract
A self-consistent 1-D model was developed to study the effects of non-local electron conductivity on power absorption and plasma density profiles in a planar inductively coupled argon discharge at low pressures (< 10 mTorr). The model consisted of three modules: (1) an electron energy distribution function (EEDF) module to compute the non-Maxwellian EEDF, (2) a non-local electron kinetics module to predict the non-local electron conductivity, RF current, electric field and power deposition profiles in the non-uniform plasma, and (3) a heavy species transport module to solve for the ion density and velocity profiles as well as the metastable density. Results using the non-local electron conductivity model were compared with predictions of a local theory (Ohm's law), under otherwise identical conditions. The RF current, electric field, and power deposition profiles were very different, especially at 1 mTorr for which the effective electron mean free path was larger than the skin depth. However, the plasma density profiles were almost identical (within 10%) for the same total power deposition in the plasma. This result suggests that, for computing plasma density profiles, a local conductivity model (Ohm's law), with much reduced computational expense, may be employed even in the non-local regime.
{
"annotation_id": "6646b894-2c10-4a92-98bc-10d0a2920cb4",
"date_created": "2026-03-02T18:00:39.176000Z",
"date_modified": "2026-03-02T18:00:39.176000Z",
"file_hash": "c702effcffddaffe6d0487312d327e1374ed918b7eab22b603a5db818345db07",
"private": false,
"record": {
"abstract": "A self-consistent 1-D model was developed to study the effects of non-local\nelectron conductivity on power absorption and plasma density profiles in a\nplanar inductively coupled argon discharge at low pressures (\u003c 10 mTorr). The\nmodel consisted of three modules: (1) an electron energy distribution function\n(EEDF) module to compute the non-Maxwellian EEDF, (2) a non-local electron\nkinetics module to predict the non-local electron conductivity, RF current,\nelectric field and power deposition profiles in the non-uniform plasma, and (3)\na heavy species transport module to solve for the ion density and velocity\nprofiles as well as the metastable density. Results using the non-local\nelectron conductivity model were compared with predictions of a local theory\n(Ohm\u0027s law), under otherwise identical conditions. The RF current, electric\nfield, and power deposition profiles were very different, especially at 1 mTorr\nfor which the effective electron mean free path was larger than the skin depth.\nHowever, the plasma density profiles were almost identical (within 10%) for the\nsame total power deposition in the plasma. This result suggests that, for\ncomputing plasma density profiles, a local conductivity model (Ohm\u0027s law), with\nmuch reduced computational expense, may be employed even in the non-local\nregime.",
"arxiv_id": "physics/0208053",
"authors": [
"Badri Ramamurthi",
"Demetre J. Economou",
"Igor D. Kaganovich"
],
"categories": [
"physics.plasm-ph"
],
"doi": "10.1088/0963-0252/12/2/308",
"title": "Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges",
"url": "https://arxiv.org/abs/physics/0208053"
},
"schema_id": "dorsal/arxiv",
"source": {
"execution_id": "0f0440ad-bbb4-4a46-ad06-774b3bfc38d1",
"id": "arXiv Dataset IDs",
"type": "Model",
"variant": "snapshot-2026-03-01",
"version": "0.1.0"
},
"user_id": 1000002
}