dorsal/arxiv
View SchemaNew combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure
| Authors | I. V. Schweigert, V. A. Schweigert |
|---|---|
| Categories | |
| ArXiv ID | physics/0308071 |
| URL | https://arxiv.org/abs/physics/0308071 |
| DOI | 10.1088/0963-0252/13/2/018 |
Abstract
A new combined PIC-MCC approach is developed for accurate and fast simulation of a radio frequency discharge at low gas pressure and high density of plasma. Test calculations of transition between different modes of electron heating in a ccrf discharge in helium and argon show a good agreement with experimental data. We demonstrate high efficiency of the combined PIC-MCC algorithm, especially for the collisionless regime of electron heating.
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"abstract": "A new combined PIC-MCC approach is developed for accurate and fast simulation\nof a radio frequency discharge at low gas pressure and high density of plasma.\nTest calculations of transition between different modes of electron heating in\na ccrf discharge in helium and argon show a good agreement with experimental\ndata.\n We demonstrate high efficiency of the combined PIC-MCC algorithm, especially\nfor the collisionless regime of electron heating.",
"arxiv_id": "physics/0308071",
"authors": [
"I. V. Schweigert",
"V. A. Schweigert"
],
"categories": [
"physics.plasm-ph"
],
"doi": "10.1088/0963-0252/13/2/018",
"title": "New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure",
"url": "https://arxiv.org/abs/physics/0308071"
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