dorsal/arxiv
View SchemaAtom lithography using MRI-type feature placement
| Authors | J. H. Thywissen, M. Prentiss |
|---|---|
| Categories | |
| ArXiv ID | physics/0209084 |
| URL | https://arxiv.org/abs/physics/0209084 |
| DOI | 10.1088/1367-2630/7/1/047 |
| Journal | New J. Phys. 7, 47 (2005) |
Abstract
We demonstrate the use of frequency-encoded light masks in neutral atom lithography. We demonstrate that multiple features can be patterned across a monotonic potential gradient. Features as narrow as 0.9 microns are fabricated on silicon substrates with a metastable argon beam. Internal state manipulation with such a mask enables continuously adjustable feature positions and feature densities not limited by the optical wavelength, unlike previous light masks.
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"abstract": "We demonstrate the use of frequency-encoded light masks in neutral atom\nlithography. We demonstrate that multiple features can be patterned across a\nmonotonic potential gradient. Features as narrow as 0.9 microns are fabricated\non silicon substrates with a metastable argon beam. Internal state manipulation\nwith such a mask enables continuously adjustable feature positions and feature\ndensities not limited by the optical wavelength, unlike previous light masks.",
"arxiv_id": "physics/0209084",
"authors": [
"J. H. Thywissen",
"M. Prentiss"
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"categories": [
"physics.atom-ph"
],
"doi": "10.1088/1367-2630/7/1/047",
"journal_ref": "New J. Phys. 7, 47 (2005)",
"title": "Atom lithography using MRI-type feature placement",
"url": "https://arxiv.org/abs/physics/0209084"
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