{
  "annotation_id": "29fd7f29-144a-4bbc-9063-46d04dab7357",
  "date_created": "2026-03-02T18:00:53.788000Z",
  "date_modified": "2026-03-02T18:00:53.788000Z",
  "file_hash": "d7182ea66f5565e4b87441dd77da7d85d916f9059a21e9a1a5446ff9dfba60e5",
  "private": false,
  "record": {
    "abstract": "A large diameter plasma over 300 mm in diameter is produced by electron\ncyclotron resonance (ECR) discharges using a newly developed large diameter\nchamber of 400 mm in inner diameter. It is found that the electron temperature\ndecreases as nitrogen gas is added to pure argon plasma, which is considered\nthat nitrogen molecules absorb the electron energy into the vibrational energy\nand lead to the decrease of the electron temperature. Moreover, it is found\nthat the plasma uniformity is improved by adding nitrogen gas, suggesting that\nthe adjunction of nitrogen gas is effective for producing uniform and low\nelectron temperature plasma.",
    "arxiv_id": "physics/0410135",
    "authors": [
      "Mayuko Koga",
      "Yasuhiro Hishikawa",
      "Hayato Tsuchiya",
      "Yoshinobu Kawai"
    ],
    "categories": [
      "physics.plasm-ph"
    ],
    "title": "Production of a large diameter ECR plasma for plasma processing",
    "url": "https://arxiv.org/abs/physics/0410135"
  },
  "schema_id": "dorsal/arxiv",
  "source": {
    "execution_id": "30e2e079-0326-46ca-88f5-7bfaa46e45fc",
    "id": "arXiv Dataset IDs",
    "type": "Model",
    "variant": "snapshot-2026-03-01",
    "version": "0.1.0"
  },
  "user_id": 1000002
}