dorsal/arxiv
View SchemaQuantum lithography by coherent control of classical light pulses
| Authors | Avi Pe'er, Barak Dayan, Marija Vucelja, Yaron Silberberg, Asher A. Friesem |
|---|---|
| Categories | |
| ArXiv ID | quant-ph/0411163 |
| URL | https://arxiv.org/abs/quant-ph/0411163 |
| DOI | 10.1364/OPEX.12.006600 |
| Journal | Opt. Express. 12, 6600 (2004) |
Abstract
The smallest spot in optical lithography and microscopy is generally limited by diffraction. Quantum lithography, which utilizes interference between groups of N entangled photons, was recently proposed to beat the diffraction limit by a factor N. Here we propose a simple method to obtain N photons interference with classical pulses that excite a narrow multiphoton transition, thus shifting the "quantum weight" from the electromagnetic field to the lithographic material. We show how a practical complete lithographic scheme can be developed and demonstrate the underlying principles experimentally by two-photon interference in atomic Rubidium, to obtain focal spots that beat the diffraction limit by a factor of 2.
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"abstract": "The smallest spot in optical lithography and microscopy is generally limited\nby diffraction. Quantum lithography, which utilizes interference between groups\nof N entangled photons, was recently proposed to beat the diffraction limit by\na factor N. Here we propose a simple method to obtain N photons interference\nwith classical pulses that excite a narrow multiphoton transition, thus\nshifting the \"quantum weight\" from the electromagnetic field to the\nlithographic material. We show how a practical complete lithographic scheme can\nbe developed and demonstrate the underlying principles experimentally by\ntwo-photon interference in atomic Rubidium, to obtain focal spots that beat the\ndiffraction limit by a factor of 2.",
"arxiv_id": "quant-ph/0411163",
"authors": [
"Avi Pe\u0027er",
"Barak Dayan",
"Marija Vucelja",
"Yaron Silberberg",
"Asher A. Friesem"
],
"categories": [
"quant-ph",
"physics.atom-ph",
"physics.class-ph",
"physics.optics"
],
"doi": "10.1364/OPEX.12.006600",
"journal_ref": "Opt. Express. 12, 6600 (2004)",
"title": "Quantum lithography by coherent control of classical light pulses",
"url": "https://arxiv.org/abs/quant-ph/0411163"
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