{
  "annotation_id": "1a4de024-4b67-4d7f-9bb6-0330b3e3639c",
  "date_created": "2026-03-02T18:01:14.014000Z",
  "date_modified": "2026-03-02T18:01:14.014000Z",
  "file_hash": "31cbf88e2aded39cedfa7e276c86831011b5f330853ac0382e141c8a55bb535c",
  "private": false,
  "record": {
    "abstract": "Micro-Electro-Mechanical Systems (MEMS) comb drives are used for both as\nsensors and actuators. As a result, they have been considered to be very\nimportant in MEMS technology and has been under intense study for last few\nyears. The actuation and the sensitivity are both dependent in a major way on\nthe electrostatic configuration of the comb structure. As a result, accurate\nestimation of the electrostatic configuration of comb drives is crucial in both\ndesign and interpretation phases. The nearly exact Boundary Element Method\n(neBEM) solver has been developed recently and used successfully to solve\ndifficult problems related to electrostatics. This solver uses exact analytic\nexpression for computing the influence of singularity distributions instead of\nadopting the conventional and convenient approximation of nodal concentration\nof charges. Due to the exact foundation expressions, the solver has been found\nto be exceptionally accurate in the complete physical domain, including the\nnear field. In this work, we explore the possibility of using the neBEM solver\nto solve 3D electrostatic problems related to comb drives. In particular, we\ninvestigate the relationship between the accuracy achieved and the\ncomputational expenses incurred for a realistic comb drive geometry. In the\nprocess, we estimate the charge density distribution, potential distribution\nand the capacitance of the comb structure. The study has led us to the\nconclusion that the neBEM solver can yield very accurate estimates of all the\nproperties of interest at a reasonable computational expenditure.",
    "arxiv_id": "physics/0612155",
    "authors": [
      "S. Mukhopadhyay",
      "N. Majumdar"
    ],
    "categories": [
      "physics.comp-ph",
      "physics.ins-det"
    ],
    "title": "Use of the neBEM solver to Compute the 3D Electrostatic Properties of   Comb Drives",
    "url": "https://arxiv.org/abs/physics/0612155"
  },
  "schema_id": "dorsal/arxiv",
  "source": {
    "execution_id": "81013004-c262-4b20-9f86-eb650209f5ce",
    "id": "arXiv Dataset IDs",
    "type": "Model",
    "variant": "snapshot-2026-03-01",
    "version": "0.1.0"
  },
  "user_id": 1000002
}