dorsal/arxiv
View SchemaPlasma synthesis of single crystal silicon nanoparticles for novel electronic device applications
| Authors | Ameya Bapat, Curtis Anderson, Christopher R. Perrey, C. Barry Carter, Stephen A. Campbell, Uwe Kortshagen |
|---|---|
| Categories | |
| ArXiv ID | physics/0410038 |
| URL | https://arxiv.org/abs/physics/0410038 |
| DOI | 10.1088/0741-3335/46/12B/009 |
Abstract
Single-crystal nanoparticles of silicon, several tens of nm in diameter, may be suitable as building blocks for single-nanoparticle electronic devices. Previous studies of nanoparticles produced in low-pressure plasmas have demonstrated the synthesis nanocrystals of 2-10 nm diameter but larger particles were amorphous or polycrystalline. This work reports the use of a constricted, filamentary capacitively coupled low-pressure plasma to produce single-crystal silicon nanoparticles with diameters between 20-80 nm. Particles are highly oriented with predominant cubic shape. The particle size distribution is rather monodisperse. Electron microscopy studies confirm that the nanoparticles are highly oriented diamond-cubic silicon.
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"abstract": "Single-crystal nanoparticles of silicon, several tens of nm in diameter, may\nbe suitable as building blocks for single-nanoparticle electronic devices.\nPrevious studies of nanoparticles produced in low-pressure plasmas have\ndemonstrated the synthesis nanocrystals of 2-10 nm diameter but larger\nparticles were amorphous or polycrystalline. This work reports the use of a\nconstricted, filamentary capacitively coupled low-pressure plasma to produce\nsingle-crystal silicon nanoparticles with diameters between 20-80 nm. Particles\nare highly oriented with predominant cubic shape. The particle size\ndistribution is rather monodisperse. Electron microscopy studies confirm that\nthe nanoparticles are highly oriented diamond-cubic silicon.",
"arxiv_id": "physics/0410038",
"authors": [
"Ameya Bapat",
"Curtis Anderson",
"Christopher R. Perrey",
"C. Barry Carter",
"Stephen A. Campbell",
"Uwe Kortshagen"
],
"categories": [
"physics.plasm-ph",
"physics.atm-clus"
],
"doi": "10.1088/0741-3335/46/12B/009",
"title": "Plasma synthesis of single crystal silicon nanoparticles for novel electronic device applications",
"url": "https://arxiv.org/abs/physics/0410038"
},
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